设备服务事业部-设备代理
3 晶圆传送盒(FOUP) Stage 设备前端模块(EFEM)加载互锁真空室(LOAD LOCK Chamber, 除气或者冷却)2 转移室(Transfer Chambers)2 Slot Pass-Thru Stage除气室或者冷却室...
2024-01-29